Hexamethyldisilazane, Electronic/Cleanroom Grade

Molecular Formula
C6H19NSi2
Catalog Number
H1024
Supplier/Brand
Spectrum Chemical
CAS Number
999-97-3

Hexamethyldisilazane, Electronic/Cleanroom Grade, also known as Bis(trimethylsilyl)amine, is used in the electronics industry as a primer and adhesion promoter in the manufacture of semiconductors and photovoltaics. Spectrum's electronic grade chemicals have extremely low metals content and makes them an excellent choice for use in etching solutions for semiconductor chips and other sensitive electronics applications.


Synonyms: HMDS

Shipping Information

DOT: UN3286, Flammable liquid, toxic, corrosive, n.o.s. (hexamethyldisilazane), 3 (6.1, 8), PG II

Largest individual container shippable via:
UPS/FedEx Ground: 1 L    UPS Air: 500 ml    FedEx Air: 1 L

Additional UPS-imposed hazardous material charge plus $15.00 for poison pack.
Tariff No. 2931909050

prop65WARNING: Cancer and Reproductive Harm - www.P65Warnings.ca.gov

Storage Information

MOISTURE SENSITIVE: Keep tightly closed.

Certificates of Analysis

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2023