Octadecyltrichlorosilane

Molecular Formula
C18H37Cl3Si
Catalog Number
O2010
Supplier/Brand
Spectrum Chemical
CAS Number
112-04-9

Octadecyltrichlorosilane, also known as ODTS or n-octadecyltrichlorosilane, is an organometallic chemical used to form monolayer thin films on silicon dioxide substrates in semiconductor industry. Ungraded products supplied by Spectrum are indicative of a grade suitable for general industrial use or research purposes and typically are not suitable for human consumption or therapeutic use.


Synonyms: Trichlorooctadecylsilane

Shipping Information

When shipping via FedEx Air the item will ship priority overnight. A higher hazmat fee will apply.

DOT: UN1800, Octadecyltrichlorosilane, 8, PG II

Largest individual container shippable via:
UPS/FedEx Ground: 20 L    UPS Air: Not accepted    FedEx Air: 2.5 L

Additional UPS-imposed hazardous material charge.

Storage Information

MOISTURE SENSITIVE, AIR SENSITIVE: Keep tightly closed.

Certificates of Analysis

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2023